Equipment
AVM-3020
190015
Equipment
AVM-3020
190015
設備規格
Machine outlier (L*W*H)：1620*1220*2000
Voltage：208V/220V
Loading system：Wafer Robot-RW series
Detection capability：1um
Advantage
設備特色
Hand free
Data correctness
Reduce product movement risks
HEPA air clean
